V WMSSE

Abstracts

Abstract information

English title:	Analysis of the interaction of ionic-atomic fluxes with the surface of substrates using the SRIM-TRIM software
Spanish title:	An�lisis de la interacci�n de flujos ionico-at�micos con la superficie de substratos mediante el software SRIM-TRIM
English abstract:	The present analysis through the use of the computational tool (SRIM-TRIM Software) allows establishing an approximate model of the penetration range and distribution profile of the ions generated in the high voltage discharge process of the Joint Universal Plasma and Ion Technology Experimental Reactor. In the case of discharges with energies of 10 keV and 20 keV, the simulations carried out made it possible to determine the implantation profiles for zirconium, aluminum, titanium, carbon, boron, and nitrogen ions on silicon substrates, obtaining a greater depth of implantation for boron ions and to a lesser extent for zirconium ions. These results will allow us to establish studies of approximate models in the formation of the interface that lead to the generation of coatings with a higher degree of adherence.
Spanish abstract:	El presente an�lisis mediante el uso de la herramienta computacional (Software SRIM-TRIM) permite establecer un modelo aproximado del rango de penetraci�n y perfil de distribuci�n de los iones generados en el proceso de la descarga de alto voltaje del reactor "Joint Universal Plasma and Ion Technology Experimental Reactor". En el caso de las descargas con energ�as de 10 keV y 20 keV las simulaciones realizadas permitieron determinar los perfiles de implantaci�n para iones de circonio, aluminio, titanio, carbono, boro y nitr�geno en substratos de silicio obteni�ndose una mayor profundidad de implantaci�n para los iones de boro y en menor proporci�n para los iones de circonio. Estos resultados permitir�n establecer estudios de modelos aproximados en la formaci�n de la interfaz que conduzcan a la generaci�n de recubrimientos con mayor grado de adherencia.
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Authors

Name	Institution	Email
Fredy Fabian Parada Becerra	Universidad Industrial de Santander	confredyfabian@gmail.com
Carlos Jos� P�ez Gonz�lez	Universidad Industrial de Santander	cjpaezg@uis.edu.co
Petr Tsygankov	Universidad Industrial de Santander	piotrtsy@mail.ru
Eduardo Alberto Orozco Ospino	Universidad Industrial de Santander	eaorozco@uis.edu.co
Alejandro David Mart�nez Amar�s	Universidad de Santander	alejandrom@udes.edu.co
Jes�s Eduardo L�pez Dur�n	Universidad Industrial de Santander	jelopez2663@gmail.com

Presentation

Room:	Principal Room
Date:	26 July 2022
Hour:	17:30 - 17:50

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V WMSSE
V Workshop on Modeling and Simulation for Science and Engineering

Previous editions:
I WMSSE
II WMSSE
III WMSSE
IV WMSSE

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